Rotary microelectromechanical system comb-drive actuator...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 06 Vol. 11; Iss. 2

Rotary microelectromechanical system comb-drive actuator with smooth sidewall for photonic applications

Huda, Mohammad Quamrul, Fahim Amin, Talukder Mohammad, Ning, Yuebin, McKinnon, Graham, Tulip, John, Jäger, Wolfgang
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.023012
Date:
June, 2012
File:
PDF, 5.20 MB
english, 2012
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