Novel optical sensor based on morphology-dependent resonances for measuring thermal deformation in microelectromechanical systems devices
Rahman, AnisurVolume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3222918
Date:
July, 2009
File:
PDF, 149 KB
english, 2009