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SPIE Proceedings [SPIE Electronic Imaging 2004 - San Jose, CA (Sunday 18 January 2004)] Three-Dimensional Image Capture and Applications VI - Chromatic confocal detection for high-speed microtopography measurements
Ruprecht, Aiko K., Koerner, Klaus, Wiesendanger, Tobias F., Tiziani, Hans J., Osten, Wolfgang, Corner, Brian D., Li, Peng, Pargas, Roy P.Volume:
5302
Year:
2004
Language:
english
DOI:
10.1117/12.525658
File:
PDF, 413 KB
english, 2004