Mask replication using jet and flash imprint lithography

Mask replication using jet and flash imprint lithography

Selinidis, Kosta S.
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Volume:
10
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3646523
Date:
October, 2011
File:
PDF, 2.48 MB
english, 2011
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