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Capacitor Property and Leakage Current Mechanism of ZrO 2 Thin Dielectric Films Prepared by Anodic Oxidation
Kamijyo, Masahiro, Onozuka, Tomotake, Shinkai, Satoko, Sasaki, Katsutaka, Yamane, Misao, Abe, YoshioVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.4399
Date:
July, 2003
File:
PDF, 254 KB
english, 2003