Controlling damping and quality factors of silicon microcantilevers by selective metallization
Sosale, Guruprasad, Das, Kaushik, Fréchette, Luc, Vengallatore, SrikarVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/105010
Date:
October, 2011
File:
PDF, 555 KB
english, 2011