A framework for using optical sensors in nanomeasuring machines over I++/DME
Sparrer, E, Machleidt, T, Hausotte, T, Franke, K-H, Manske, EVolume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/7/074013
Date:
July, 2012
File:
PDF, 2.08 MB
english, 2012