Optical emission spectroscopy study on deposition process...

Chinese Physics 2006 / 11 Vol. 15; Iss. 11

Optical emission spectroscopy study on deposition process of microcrystalline silicon

Zhi-Meng, Wu, Qing-Song, Lei, Xin-Hua, Geng, Ying, Zhao, Jian, Sun, Jian-Ping, Xi
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Volume:
15
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/15/11/042
Date:
November, 2006
File:
PDF, 566 KB
english, 2006
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