MEMS-based microstructures for nanomechanical...

Smart Materials and Structures 2009 / 11 Vol. 18; Iss. 11

MEMS-based microstructures for nanomechanical characterization of thin films

Boé, A, Safi, A, Coulombier, M, Fabrègue, D, Pardoen, T, Raskin, J-P
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Volume:
18
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/18/11/115018
Date:
November, 2009
File:
PDF, 798 KB
english, 2009
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