Optical designs of grazing incidence collector for extreme...

Journal of Micro/Nanolithography MEMS and MOEMS 2007 / 10 Vol. 6; Iss. 4

Optical designs of grazing incidence collector for extreme ultraviolet lithography

Zocchi, Fabio E.
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Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2811949
Date:
October, 2007
File:
PDF, 715 KB
english, 2007
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