SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MEMS/MOEMS Components and Their Applications II - Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process
Tsai, Chien-Chung, Cheng, Pao-Ting, Tseng, Yao-Chen, Henning, Albert K.Volume:
5717
Year:
2005
Language:
english
DOI:
10.1117/12.589564
File:
PDF, 1016 KB
english, 2005