Diagnosis of the Argon Plasma in a PECVD Coating Machine

Plasma Science and Technology 2008 / 12 Vol. 10; Iss. 6

Diagnosis of the Argon Plasma in a PECVD Coating Machine

Qing, Wang, Dechun, Ba, Jian, Feng
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Volume:
10
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/10/6/14
Date:
December, 2008
File:
PDF, 1.20 MB
english, 2008
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