Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography
Li, Yi-Gui, Yang, Chun-Sheng, Liu, Jing-Quan, Sugiyama, SusumuVolume:
28
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/28/3/038101
Date:
March, 2011
File:
PDF, 1.07 MB
english, 2011