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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Optical Micro- and Nanometrology IV - Determination of the metrological characteristics of optical surface topography measuring instruments
Leach, R. K., Giusca, C. L., Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangVolume:
8430
Year:
2012
Language:
english
DOI:
10.1117/12.921452
File:
PDF, 332 KB
english, 2012