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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Nanosecond laser-induced back side wet etching of fused silica with a copper-based absorber liquid
Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Lorenz, Pierre, Zehnder, Sarah, Ehrhardt, Martin, Frost, Frank, Zimmer, Klaus, Schwaller, PatrickVolume:
8967
Year:
2014
Language:
english
DOI:
10.1117/12.2037614
File:
PDF, 603 KB
english, 2014