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SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Emerging Lithographic Technologies - Conducting polyaniline coatings for submicron lithography and SEM metrology
Graham, Teresita O., Angelopoulos, Marie, Furman, Bruce, Chen, K. Rex, Moreau, Wayne M., Seeger, David E.Volume:
3048
Year:
1997
Language:
english
DOI:
10.1117/12.275809
File:
PDF, 1.19 MB
english, 1997