Quasi Crystal Lindhard–Scharff–Schiott Theory and Database...

Japanese Journal of Applied Physics 2009 / 7 Vol. 48; Iss. 7

Quasi Crystal Lindhard–Scharff–Schiott Theory and Database for Ion Implantation Profiles in Si 1- x Ge x Substrate Based on the Theory

Suzuki, Kunihiro, Tada, Yoko, Itani, Tsukasa, Kataoka, Yuji, Kojima, Shuichi, Nagayama, Tsutomu, Nagayama, Susumu
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.071202
Date:
July, 2009
File:
PDF, 679 KB
english, 2009
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