SPIE Proceedings [SPIE International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - Singapore, Singapore (Tuesday 9 April 2013)] International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - Interferometric measurement of functional surfaces
Lehmann, Peter, Quan, Chenggen, Qian, Kemao, Xie, Weichang, Kühnhold, Peter, Asundi, Anand, Niehues, JanVolume:
8769
Year:
2013
Language:
english
DOI:
10.1117/12.2021478
File:
PDF, 638 KB
english, 2013