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Investigation of a Polishing Pad and a Carrier Film for Decreasing Edge Roll Off of Workpiece
Satake, Urara, Wang, Wen Xiao, Enomoto, Toshiyuki, Tabata, NorikazuVolume:
325
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.325.476
Date:
August, 2011
File:
PDF, 396 KB
english, 2011