Fabrication of diamond-like carbon films using pseudo-spark discharge plasma-enhanced chemical vapor deposition method
Kamada, Takaharu, Sohma, Yoshitake, Watanabe, Masayuki, Mukaigawa, SeijiVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.068006
Date:
June, 2014
File:
PDF, 952 KB
english, 2014