SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Beijing, China (Wednesday 17 June 2009)] International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors - Integrated thermoelectric infrared sensor with XeF2 etching
Xu, De-hui, Xiong, Bin, Wang, Yue-lin, Liu, Mi-feng, Chen, Xu-yuan, Wang, Yue-lin, Zhou, Zhi-ping, Wang, Qing-kangVolume:
7381
Year:
2009
Language:
english
DOI:
10.1117/12.834699
File:
PDF, 2.39 MB
english, 2009