Plasma etch transfer of self-assembled polymer patterns
Johnston, Danvers E.Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.3.031306
Date:
July, 2012
File:
PDF, 2.04 MB
english, 2012