Investigation of pseudo lateral field excited acoustic wave...

Japanese Journal of Applied Physics 2014 / 07 Vol. 53; Iss. 7S

Investigation of pseudo lateral field excited acoustic wave gas sensors with finite element method

Chen, Yung-Yu, Lai, Yen-Ting, Hsu, Chao-Hung
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.07KD01
Date:
July, 2014
File:
PDF, 335 KB
english, 2014
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