Direct Observation of Nanoscale Native Oxide on 6H-SiC...

Applied Physics Express 2012 / 10 Vol. 5; Iss. 10

Direct Observation of Nanoscale Native Oxide on 6H-SiC Surface and Its Effect on the Surface Band Bending

Huang, Wei, Chang, Shao-Hui, Liu, Xue-Chao, Shi, Biao, Zhou, Tian-Yu, Liu, Xi, Yan, Cheng-Feng, Zheng, Yan-Qing, Yang, Jian-Hua, Shi, Er-Wei, Zhang, Wen-Hua, Zhu, Jun-Fa
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Volume:
5
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/apex.5.105802
Date:
October, 2012
File:
PDF, 391 KB
english, 2012
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