Radio-Frequency Inductors on High-Resistivity Silicon...

Japanese Journal of Applied Physics 2013 / 04 Vol. 52; Iss. 4S

Radio-Frequency Inductors on High-Resistivity Silicon Substrates with a Nanocrystalline Silicon Passivation Layer

Wang, Ruey-Lue, Chen, Chao-Jung, Lin, Yu-Ru, Liu, Pin-Yi, Su, Yan-Kuin, Hsueh, Ting-Jen
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.04CB03
Date:
April, 2013
File:
PDF, 1.00 MB
english, 2013
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