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Robust micromachining of compliant mechanisms using silicides
Khosraviani, Kourosh, Leung, Albert MVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/1/015015
Date:
January, 2013
File:
PDF, 571 KB
english, 2013