A novel amorphization–etch alternating process for...

A novel amorphization–etch alternating process for Si(1 0 0)

Mekkakia-Maaza, N, Dussart, R, Tillocher, T, Lefaucheux, P, Ranson, P
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/4/045023
Date:
April, 2013
File:
PDF, 738 KB
english, 2013
Conversion to is in progress
Conversion to is failed