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A novel amorphization–etch alternating process for Si(1 0 0)
Mekkakia-Maaza, N, Dussart, R, Tillocher, T, Lefaucheux, P, Ranson, PVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/4/045023
Date:
April, 2013
File:
PDF, 738 KB
english, 2013