Thickness-Dependent Interface Parameters of Silicon Oxide Films Grown on Plasma Hydrogenated Silicon
Alexandrova, S., Szekeres, A.Volume:
159
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.159.163
Date:
January, 2010
File:
PDF, 295 KB
english, 2010