Preparation and Characterization of Deposited Tetraethylorthosilicate-SiO2/SiC MIS Structure
Hemmi, Mitsunori, Sakai, Takashi, Yamakami, Tomohiko, Hayashibe, Rinpei, Kamimura, KiichiVolume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.805
Date:
January, 2013
File:
PDF, 1000 KB
english, 2013