Evaluation of Degradation due to Electron Irradiation of...

Materials Science Forum 2014 / 2 Vol. 778-780

Evaluation of Degradation due to Electron Irradiation of Si1-xCx S/D n-type MOSFETs

Hori, Masato, Asai, Yuki, Yoneoka, Masashi, Tsunoda, Isao, Takakura, Kenichiro, Nakashima, Toshiyuki, Gonzalez, Mireia B., Simoen, Eddy, Claeys, Cor
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Volume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.1197
Date:
February, 2014
File:
PDF, 570 KB
english, 2014
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