Influence of N2 Proportion on Mechanical Properties of SiCN...

Advanced Materials Research 2010 / 3 Vol. 97-101

Influence of N2 Proportion on Mechanical Properties of SiCN Thin Films Prepared by DIBSD

Hong, Bo, Wu, Xue Mei, Zhuge, Lan Jian, Wu, Zhao Feng, Zhou, Fei
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Volume:
97-101
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.97-101.1243
Date:
March, 2010
File:
PDF, 602 KB
english, 2010
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