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SPIE Proceedings [SPIE SPIE LASE: Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 24 January 2009)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VII - Effects of pulse duration on the ns-laser pulse induced removal of thin film materials used in photovoltaics
Bovatsek, Jim, Tamhankar, Ashwini, Patel, Raj, Bulgakova, Nadezhda M., Bonse, Jörn, Meunier, Michel, Holmes, Andrew S., Niino, Hiroyuki, Gu, BoVolume:
7201
Year:
2009
Language:
english
DOI:
10.1117/12.809842
File:
PDF, 1.20 MB
english, 2009