Numerical analysis and demonstration of a 2-DOF large-size...

Journal of Micromechanics and Microengineering 2011 / 09 Vol. 21; Iss. 9

Numerical analysis and demonstration of a 2-DOF large-size micromirror with sloped electrodes

Jin, Joo-Young, Park, Jae-Hyoung, Yoo, Byung-Wook, Jang, Yun-Ho, Kim, Yong-Kweon
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/9/095006
Date:
September, 2011
File:
PDF, 447 KB
english, 2011
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