Selective area in situ conversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide
Liu, Neng, Huang, Xiaohuan, Dubowski, Jan JVolume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/38/385106
Date:
September, 2014
File:
PDF, 353 KB
english, 2014