Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas
Pandey, Anil, Nakamura, Keiji, Sugai, HideoVolume:
6
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.6.056202
Date:
May, 2013
File:
PDF, 1.41 MB
english, 2013