Investigation of Local Bending Stress Effect on...

Investigation of Local Bending Stress Effect on Complementary Metal–Oxide–Semiconductor Characteristics in Thinned Si Chip for Chip-to-Wafer Three-Dimensional Integration

Kino, Hisashi, Bea, Ji Choel, Murugesan, Mariappan, Lee, Kang Wook, Fukushima, Takafumi, Koyanagi, Mitsumasa, Tanaka, Tetsu
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.04CB11
Date:
April, 2013
File:
PDF, 830 KB
english, 2013
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