High-throughput characterization of film thickness in thin...

Science and Technology of Advanced Materials 2011 / 10 Vol. 12; Iss. 5

High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy

Lai, Yiu Wai, Krause, Michael, Savan, Alan, Thienhaus, Sigurd, Koukourakis, Nektarios, Hofmann, Martin R, Ludwig, Alfred
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Volume:
12
Language:
english
Journal:
Science and Technology of Advanced Materials
DOI:
10.1088/1468-6996/12/5/054201
Date:
October, 2011
File:
PDF, 1.05 MB
english, 2011
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