Relationship between center-peaked plasma density profiles and harmonic electromagnetic waves in very high frequency capacitively coupled plasma reactors
Sawada, Ikuo, Ventzek, Peter L. G., Lane, Barton, Ohshita, Tatsuro, Upadhyay, Rochan R., Raja, Laxminarayan L.Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.03DB01
Date:
January, 2014
File:
PDF, 313 KB
english, 2014