Structural improvement in resonant silicon sensors to...

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 03 Vol. 13; Iss. 1

Structural improvement in resonant silicon sensors to sub-ppm/°C temperature coefficient of resonance frequency

Hou, Zhanqiang, Wu, Xuezhong, Xiao, Dingbang, Chen, Zhihua, Su, Jianbin
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.1.013016
Date:
March, 2014
File:
PDF, 1.71 MB
english, 2014
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