Experimental characterization of dynamic micromechanical transducers
Lärmer, Franz, Schilp, Andrea, Funk, Karsten, Burrer, ChristianVolume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/1/037
Date:
March, 1996
File:
PDF, 932 KB
english, 1996