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Fabrication challenges for indium phosphide microsystems
Siwak, N P, Fan, X Z, Ghodssi, RVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/4/043001
Date:
April, 2015
File:
PDF, 274 KB
english, 2015