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Effect of Low Temperature Annealing Prior to Laser Annealing of an Ultrashallow n[sup +]/p Junction
Jang, Taesung, Baek, Sungkweon, Hwang, HyunsangVolume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1519852
File:
PDF, 511 KB
english, 2002