Analytical design of polymer-encapsulated radio frequency...

Analytical design of polymer-encapsulated radio frequency microelectromechanical devices

Monajemi, Pejman
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.021207
Date:
May, 2012
File:
PDF, 6.08 MB
english, 2012
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