SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV - Fabrication of optical filters using multilayered porous silicon
Schoenfeld, Winston V., Gaber, Noha, Khalil, Diaa, Wang, Jian Jim, Loncar, Marko, Shaarawi, Amr, Suleski, Thomas J.Volume:
7927
Year:
2011
Language:
english
DOI:
10.1117/12.873615
File:
PDF, 4.32 MB
english, 2011