Improvement of tensile strength of freestanding single...

Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment

Mitwally, Mohamed E., Tsuchiya, Toshiyuki, Tabata, Osamu, Sedky, Sherif
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Volume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JM03
Date:
June, 2014
File:
PDF, 342 KB
english, 2014
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