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Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
Mitwally, Mohamed E., Tsuchiya, Toshiyuki, Tabata, Osamu, Sedky, SherifVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JM03
Date:
June, 2014
File:
PDF, 342 KB
english, 2014