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Characterization of microparticles and oxide layers generated by laser irradiation of diamond-machined silicon wafers
Yan, Jiwang, Sakai, Shin, Isogai, Hiromichi, Izunome, KojiVolume:
26
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/26/2/025006
Date:
February, 2011
File:
PDF, 656 KB
english, 2011