Two-axis MEMS scanners with radial vertical combdrive...

Journal of Optics A Pure and Applied Optics 2008 / 04 Vol. 10; Iss. 4

Two-axis MEMS scanners with radial vertical combdrive actuators—design, theoretical analysis, and fabrication

Tsai, Jui-che, Chiou, Sheng-jie, Hsieh, Tien-liang, Sun, Chia-Wei, Hah, Dooyoung, Wu, Ming C
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Volume:
10
Language:
english
Journal:
Journal of Optics A: Pure and Applied Optics
DOI:
10.1088/1464-4258/10/4/044006
Date:
April, 2008
File:
PDF, 2.45 MB
english, 2008
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