Noise and mismatch optimization for capacitive MEMS readout

Journal of Semiconductors 2009 / 11 Vol. 30; Iss. 11

Noise and mismatch optimization for capacitive MEMS readout

Chong, Zhang, Qisong, Wu, Tao, Yin, Haigang, Yang
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Volume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/11/115003
Date:
November, 2009
File:
PDF, 1.22 MB
english, 2009
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