Effect of Process Parameters on Friction Force and Material...

Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing

Park, Boumyoung, Lee, Hyunseop, Kim, Youngjin, Kim, Hyoungjae, Jeong, Haedo
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.8771
Date:
December, 2008
File:
PDF, 175 KB
english, 2008
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