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Effect of Process Parameters on Friction Force and Material Removal in Oxide Chemical Mechanical Polishing
Park, Boumyoung, Lee, Hyunseop, Kim, Youngjin, Kim, Hyoungjae, Jeong, HaedoVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.8771
Date:
December, 2008
File:
PDF, 175 KB
english, 2008