Time resolved electron density and temperature measurements...

Plasma Sources Science and Technology 2002 / 11 Vol. 11; Iss. 4

Time resolved electron density and temperature measurements on a capacitively coupled helium RF discharge

Sande, M J van de, Deckers, R H M, Lepkojus, F, Buscher, W, Mullen, J J A M van der
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Volume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/4/313
Date:
November, 2002
File:
PDF, 775 KB
english, 2002
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